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NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA

GB/T 36646-2018

Equipment for preparation of nitride semiconductor materials by hydride vapor phase epitaxy

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The Standardization Administration of the People's Republic of China

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GB Standard Code	GB/T 36646-2018
Standard Category	China National Standards
GB Standard English Title	Equipment for preparation of nitride semiconductor materials by hydride vapor phase epitaxy
GB Standard Chinese Title	制备氮化物半导体材料用氢化物气相外延设备
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